PECVD.docx
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PECVD.docx
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PECVD
【数据处理】
样品1在空气中第一个周期的第十次数据
Voltag
Current
Resistance
I/A
-10.00007
-1.05E-05
948214.5719
-1.05462E-05
-9.60008
-1.05E-05
915363.0004
-1.04877E-05
-9.199965
-1.03E-05
894753.7084
-1.02821E-05
-8.799911
-1.01E-05
874115.297
-1.00672E-05
-8.400071
-9.85E-06
852830.4289
-9.84964E-06
-7.999971
-9.62E-06
831817.0986
-9.61746E-06
-7.599986
-9.37E-06
810942.7536
-9.37179E-06
-7.200043
-9.10E-06
791548.8374
-9.09615E-06
-6.800035
-8.85E-06
768241.1424
-8.85143E-06
-6.399989
-8.58E-06
745861.4814
-8.58067E-06
-5.999933
-8.33E-06
720480.4746
-8.32768E-06
-5.599972
-8.03E-06
697431.7818
-8.02942E-06
-5.199949
-7.75E-06
670905.4112
-7.75064E-06
-4.799947
-7.45E-06
643918.259
-7.45428E-06
-4.399972
-7.17E-06
613956.749
-7.16658E-06
-3.99999
-6.86E-06
583377.5486
-6.85661E-06
-3.599933
-6.54E-06
550593.2753
-6.53828E-06
-3.199919
-6.20E-06
516346.4915
-6.19723E-06
-2.799863
-5.85E-06
478956.8562
-5.84575E-06
-2.399798
-5.47E-06
438654.1688
-5.47082E-06
-1.999845
-5.07E-06
394499.2677
-5.06932E-06
-1.599874
-4.64E-06
345012.0483
-4.63715E-06
-1.199803
-4.16E-06
288154.4281
-4.16375E-06
-0.799748
-3.64E-06
219642.5016
-3.64114E-06
-0.399736
-3.02E-06
132346.9622
-3.02036E-06
0.000347
-1.73E-06
-200.5228619
-1.73048E-06
0.399733
0.000419
954.0167064
0.000419
0.799711
0.002096
381.5415076
0.002096
1.199782
0.004861
246.8179387
0.004861
1.599897
0.008368
191.1922801
0.008368
1.999755
0.012458
160.5197463
0.012458
2.399705
0.01678
143.0098331
0.01678
2.799763
0.021507
130.179151
0.021507
3.199813
0.026617
120.2168915
0.026617
3.5995
0.032038
112.3509582
0.032038
3.999571
0.037831
105.7220533
0.037831
4.399582
0.043991
100.0109568
0.043991
4.799559
0.050481
95.07654365
0.050481
5.19955
0.0574
90.58449477
0.0574
5.599606
0.064724
86.51514122
0.064724
5.999597
0.072665
82.56515516
0.072665
6.399652
0.081045
78.96418039
0.081045
6.799743
0.090195
75.38935639
0.090195
7.199777
0.100326
71.76381995
0.100326
7.599553
0.113633
66.87804599
0.113633
7.999557
0.126322
63.32671269
0.126322
8.399658
0.140675
59.70967123
0.140675
8.799689
0.156815
56.11509741
0.156815
9.199785
0.175713
52.3568831
0.175713
9.599921
0.197222
48.67571062
0.197222
9.999941
0.222634
44.91650422
0.222634
样品1在二氧化碳中第一个周期的第十次数据
Voltage
Current
Resistance
I/A
-10.00007
-1.06E-05
946407.2267
-1.05664E-05
-9.600063
-1.03E-05
932282.0951
-1.02974E-05
-9.199956
-1.01E-05
914495.8221
-1.00601E-05
-8.800056
-9.79E-06
898811.4316
-9.79077E-06
-8.400063
-9.50E-06
884263.5119
-9.4995E-06
-7.999965
-9.25E-06
864563.2974
-9.25319E-06
-7.59998
-8.99E-06
845308.2875
-8.99078E-06
-7.200018
-8.73E-06
824277.5226
-8.73494E-06
-6.800029
-8.44E-06
805420.0988
-8.44283E-06
-6.399961
-8.18E-06
782540.0794
-8.17845E-06
-5.999934
-7.90E-06
759240.3413
-7.90255E-06
-5.599949
-7.62E-06
735316.0962
-7.6157E-06
-5.199926
-7.30E-06
712428.9102
-7.29887E-06
-4.799925
-6.99E-06
686539.6787
-6.99147E-06
-4.399977
-6.64E-06
662664.7032
-6.63982E-06
-3.999981
-6.28E-06
636603.0002
-6.28332E-06
-3.599911
-5.92E-06
608381.7474
-5.91719E-06
-3.199911
-5.52E-06
579429.6045
-5.52252E-06
-2.799852
-5.12E-06
547152.157
-5.11714E-06
-2.399782
-4.70E-06
510191.7943
-4.70369E-06
-1.999821
-4.27E-06
468210.1347
-4.2712E-06
-1.599854
-3.81E-06
420176.2905
-3.80758E-06
-1.199789
-3.30E-06
363151.6086
-3.30382E-06
-0.799735
-2.75E-06
290900.5263
-2.74917E-06
-0.399719
-2.08E-06
192440.6252
-2.0771E-06
0.000294
-5.16E-07
-569.3757202
-5.16355E-07
0.399724
0.000496
805.8951613
0.000496
0.799682
0.002447
326.8009808
0.002447
1.199769
0.005646
212.4989373
0.005646
1.599885
0.009663
165.5681465
0.009663
1.999713
0.014188
140.9439667
0.014188
2.399679
0.019019
126.172722
0.019019
2.799733
0.02422
115.5959125
0.02422
3.199791
0.029745
107.5740797
0.029745
3.599468
0.035531
101.3050013
0.035531
3.99954
0.041581
96.1867199
0.041581
4.399543
0.047895
91.8580854
0.047895
4.799522
0.054469
88.11474417
0.054469
5.199525
0.061366
84.72973634
0.061366
5.599579
0.068591
81.63722646
0.068591
5.999568
0.076288
78.64366611
0.076288
6.399623
0.084418
75.80874932
0.084418
6.799708
0.093157
72.99191687
0.093157
7.199747
0.102744
70.07462236
0.102744
7.599519
0.114749
66.22732224
0.114749
7.99952
0.126436
63.26932203
0.126436
8.39962
0.139794
60.08569753
0.139794
8.799639
0.154798
56.84594762
0.154798
9.199731
0.17237
53.37199629
0.17237
9.599871
0.192333
49.91276068
0.192333
9.999891
0.215771
46.34492587
0.215771
样品2在空气中第一个周期的第十次数据
Voltag
Current
Resistance
I/A
-10.00031
-4.65E-06
2148550.01
-4.65445E-06
-9.600336
-4.54E-06
2114293.378
-4.54068E-06
-9.20023
-4.43E-06
2078948.35
-4.42543E-06
-8.800139
-4.31E-06
2043778.673
-4.30582E-06
-8.400123
-4.18E-06
2008331.345
-4.18264E-06
-7.999997
-4.06E-06
1970590.648
-4.0597E-06
-7.600059
-3.93E-06
1931571.313
-3.93465E-06
-7.200143
-3.81E-06
1890965.174
-3.80766E-06
-6.800162
-3.68E-06
1847639.154
-3.68046E-06
-6.400085
-3.56E-06
1799940.153
-3.55572E-06
-6.000029
-3.43E-06
1748697.372
-3.43114E-06
-5.600026
-3.30E-06
1695666.774
-3.30255E-06
-5.199996
-3.17E-06
1639644.878
-3.17142E-06
-4.800035
-3.04E-06
1579986.913
-3.03802E-06
-4.40011
-2.90E-06
1516647.548
-2.90121E-06
-4.000132
-2.77E-06
1446499.37
-2.76539E-06
-3.600049
-2.63E-06
1370871.211
-2.6261E-06
-3.200025
-2.48E-06
1289067.504
-2.48243E-06
-2.799945
-2.33E-06
1199462.031
-2.33433E-06
-2.399882
-2.18E-06
1100831.49
-2.18006E-06
-1.999957
-2.02E-06
991112.9943
-2.01789E-06
-1.600003
-1.84E-06
867756.8203
-1.84384E-06
-1.199962
-1.65E-06
725884.1549
-1.6531E-06
-0.799902
-1.44E-06
556756.4407
-1.43672E-06
-0.399855
-1.17E-06
341401.586
-1.17122E-06
0.000132
-6.35E-07
-207.7979323
-6.35233E-07
0.399886
0.00046
869.3173913
0.00046
0.799857
0.001921
416.3753254
0.001921
1.199957
0.004129
290.6168564
0.004129
1.600048
0.00696
229.891954
0.00696
2.000021
0.010231
195.486365
0.010231
2.399819
0.014121
169.9468168
0.014121
2.799869
0.018126
154.4670087
0.018126
3.19995
0.022535
141.9991125
0.022535
3.599651
0.027287
131.9181662
0.027287
3.999748
0.032335
123.6971702
0.032335
4.39974
0.037723
116.6328235
0.037723
4.799668
0.043387
110.624565
0.043387
5.199661
0.049415
105.2243448
0.049415
5.599708
0.055846
100.2705297
0.055846
5.999724
0.062616
95.81774626
0.062616
6.399816
0.069909
91.54495129
0.069909
6.799898
0.077635
87.58804663
0.077635
7.199906
0.086039
83.68188845
0.086039
7.599832
0.094952
80.03867217
0.094952
7.999647
0.106999
74.7637548
0.106999
8.399775
0.117911
71.23826445
0.117911
9.199924
0.143409
64.15165018
0.143409
9.600083
0.158545
60.55115582
0.158545
10.00007
0.176095
56.78792697
0.176095
样品2在二氧化碳中第一个周期的第十次数据
Voltage
Current
Resistance
I/A
-10.00014
-4.99E-06
2004393.569
-4.98911E-06
-9.600123
-4.86E-06
1974845.115
-4.8612E-06
-9.200029
-4.73E-06
1944231.378
-4.73196E-06
-8.799966
-4.60E-06
1913064.783
-4.59993E-06
-8.399975
-4.47E-06
1880206.116
-4.46758E-06
-7.999876
-4.33E-06
1845821.238
-4.33405E-06
-7.599892
-4.20E-06
1808936.464
-4.2013E-06
-7.19995
-4.07E-06
1769541.651
-4.06882E-06
-6.799942
-3.93E-06
1728201.412
-3.93469E-06
-6.399893
-3.80E-06
1684689.992
-3.79886E-06
-5.999843
-3.66E-06
1639641.39
-3.65924E-06
-5.599871
-3.52E-06
1590148.745
-3.5216E-06
-5.199845
-3.38E-06
1538331.027
-3.38019E-06
-4.799848
-3.24E-06
1483147.053
-3.23626E-06
-4.399894
-3.09E-06
1423079.871
-3.09181E-06
-3.999898
-2.94E-06
1359308.339
-2.9426E-06
-3.599844
-2.79E-06
1290491.462
-2.78951E-06
-3.199854
-2.63E-06
1215469.685
-2.63261E-06
-2.799802
-2.47E-06
1134456.362
-2.46797E-06
-2.399741
-2.30E-06
1042933.062
-2.30095E-06
-1.999785
-2.12E-06
942069.2326
-2.12276E-06
-1.599816
-1.93E-06
827770.3356
-1.93268E-06
-1.19976
-1.73E-06
695053.301
-1.72614E-06
-0.799712
-1.49E-06
536512.7796
-1.49057E-06
-0.399693
-1.20E-06
334154.871
-1.19613E-06
0.000291
-5.76E-07
-505.031397
-5.76202E-07
0.399696
0.000511
782.183953
0.000511
0.799635
0.002154
371.2325905
0.002154
1.199695
0.004598
260.9167029
0.004598
1.599802
0.007664
208.7424322
0.007664
1.999678
0.011184
178.7981044
0.011184
2.399637
0.014988
160.1038831
0.014988
2.799696
0.01913
146.3510716
0.01913
3.199746
0.023564
135.7895943
0.023564
3.599429
0.028222
127.5398271
0.028222
3.999496
0.033103
120.8197444
0.033103
4.399505
0.038204
115.1582295
0.038204
4.799477
0.043509
110.3099818
0.043509
5.199485
0.049058
105.9864854
0.049058
5.599526
0.054842
102.1028774
0.054842
5.999502
0.060936
98.45578968
0.060936
6.399564
0.067308
95.07880193
0.067308
6.799635
0.074049
91.82615565
0.074049
7.199679
0.081283
88.57545858
0.081283
7.599646
0.08896
85.42767536
0.08896
7.999653
0.09733
82.19103051
0.09733
8.399574
0.108182
77.64299052
0.108182
8.799608
0.118116
74.49971215
0.118116
9.199701
0.129295
71.15279787
0.129295
9.599829
0.141588
67.8011484
0.141588
9.999856
0.15578
64.19216844
0.15578
U=10V
样品1
样品2
时间t/s
U/V
R/Ω
I/A
U/V
R/Ω
I/A
0
9.999958
45.25277401
0.22098
10.00011
54.14010222
0.184708
30
9.999947
44.34920304
0.225482
10.00011
55.71712726
0.17948
60
9.999953
44.41738771
0.225136
10.00008
55.91822584
0.178834
90
9.999945
43.96623814
0.227446
10.00009
56.5875203
0.176719
120
9.999943
45.63766681
0.219116
10.00007
56.52024258
0.176929
150
9.999928
45.01369777
0.222153
10.0000
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